Applications of the new fs-laser capability in tri-beam for large volume microscopy
Ali Gholinia  1@  
1 : Henry Royce Institute and Department of Materials, The University of Manchester, Manchester, M13 9PL, UK

Here we outline a triple beam microscope, which uses the new capability of an in-situ fs-laser coupled with Xe+ PFIB and electron beam. This has evolved from the more traditional Ga FIB-electron dual-beam and ex-situ laser systems. It is capable of large scale volume milling, mini test piece manufacture, serial section tomography and TEM preparation. We have studied a wide variety of materials, where we are investigating different applications including metallic, ceramics, mixed phase materials. In all cases the triple beam system shows itself to be capable of probing large (mm) volumes to collect low damage 2D and 3D images.


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